Precision XY Stage Control means motion control of XY or XYZ positioning stages that use linear motors for their motion. Precision XY and XYZ stages are used in a broad array of machines including microscopes, automated assay equipment, semiconductor capital equipment, optical equipment, scientific instruments and much more.
In this Motion Application:
- Explore Design Considerations & Techniques
The hallmark of precision XY stages versus general purpose XY stages is that the drive motor is a linear Brushless DC motor, or sometimes a linear piezo motor. Brushless DC motors in this application are generally more popular because relative to piezo motors they are less expensive and because they provide a wider range of motion speeds. So in this motion application we will limit ourselves to XY stage control using linear Brushless DC motors. - Examine Application Architecture
The diagram below shows the control flow for a typical high performance digital switching amplifier with leg current sensing. Such an amplifier architecture, coupled with high speed digital current and position servo loops, a high resolution encoder, and located on an embedded card close to the motors being controlled, can provide extremely high accuracy positioning. - View Motion Control Solutions
Since 1992 Performance Motion Devices products have been used in a wide range of XY stage control applications including biological imaging systems, blood analyzers, semiconductor metrology tools, chromatography systems, cell culture equipment, and other applications. PMD’s MC53113 Brushless Motor Control IC is ideally suited for use in embedded XY stage controllers as is PMD’s N-Series ION Drive, and PMD's Prodigy/CME Machine-Controller board.
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