Perform with high speed, high precision

Semiconductor Equipment And The Ultimate Motion Control Challenge

Semiconductor equipment represents the ultimate motion control challenge, requiring incredible precision, high throughput, and extreme reliability. For today's global semiconductor providers Performance Motion Devices answers the call. We provide motion control ICs, modules, and boards for wafer handling robots, spin coaters, material transport. We solve motion problems in ION beam implanters, vacuum pumps, nanometer-scale XY positioning, and provide a multitude of solutions for metrology, lithography, inspection, and back end processing.

Performance Motion Devices has the motion control components and software you need to design and build your semiconductor capital equipment faster, with more performance, and at a lower cost. We understand your challenges and offer a range of easy-to-deploy motion control solutions, such as integrated circuits (ICs), digital drives, digital amplifiers, and motion control boards that will meet your application requirements and help you outcompete the other guys.


Wondering which of our motion control ICs, modules, or boards will work best for your upcoming equipment design project? 

Contact us and tell us about it. We'd love to explore how our custom or turn-key ICs, modules, and boards, can best meet your Semiconductor Equipment design challenge.

High-performance semiconductor machines

Solutions in lithography, metrology, XY positioning, wafer robotics, and back-end automation

PMD is the motion control provider of choice for today's wafer handling robotics, XY positioning stages, metrology stations, and more. Whether semiconductor companies work with PMD's products directly or with our partner provider solutions, PMD's motion control at its core means incredible performance, high reliability, and ultra-safe operation.

“The main thing is we could get to market faster, because [PMD allowed] us to focus our efforts in other areas and not have to focus … on trajectory generators, PID loops, [and] motion engine type of things...”

~ Ty, Founder, Trust Automation, San Luis Obispo, CA

Make the most of your machine and robotics design projects

Torque Control ICs

New Low Cost Torque Control ICs Provide Field Oriented Control

The MC73112, MC73112N, MC71112, and MC71112N from PMD are ICs that provide torque control with advanced features for FOC, shunt regulation, PWM (Pulse Width Modulation) signal generation with shoot-through protection, and more.

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Servo Motor Performance

New Control Technique Combines Servo Performance With Step Motor Cost

When it comes to step motors, a new drive technique called stepper servo has some engineers believing they have found the holy grail of positioning motion control - the high performance of a servo motor with the low cost of a step motor.

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Solve Servo Motor Noise

Servo Motor Noise - Part of a Series On Common Motion Control Problems

A noisy or chattering servo axis is perhaps the single most common motion problem that engineers encounter when building their motor-based machine. This deep dive focuses on servo motor noise problems and how to solve them.

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Spin Coating Application for Semiconductor Wafers

Accurate velocity contouring for controlled coating thickness is critical and this use case looks at the considerations and then explains how to use high-performance motion control solutions to maximize uniformity of thin-film thickness.

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Step Motor Control

Keep Your Step Motor Position with A Closed Loop Motion Control System

Step motors are a common solution for controlling the position of moving components. This paper looks at step motor control design options and provides an in-depth review of a closed-loop motion control system.

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Motion Controllers

Motion Controller Design Architectures - A Deep Dive

This deep dive provides a detailed look at design choices, such as using off-the-shelf motion boards versus integrated machine control boards, for building a machine controller that provides advanced precision motion control.

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Industries powered by our motion control ICs, modules, and boards.

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